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Microtechnology

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Microtechnology

most half.   Note particularly the linear edge and uniformity of these stripes and their superior alignment within the window. These are the reasons for the improvement in performance.
Figure 14 shows the achievement of the counterpart elements for the next advanced micropower transistor. The characteristic fingers here are one micron wide and the space between them is also one micron. This structure, fabricated with the new projection masking system, constitutes the smallest transistor elements fabricated to date. It is planned to integrate this projection masking system into the over-all micropower program and begin the regular production of transistors of this size. We are budgeting research and development funds to produce two prototypes of the optical system for delivery to two principal micropower transistor developers so that they can make these smaller devices.
There are many other facets of the effort to improve the performance of micropower devices; but the technique for size reduction and improved precision discussed above, which has yet to be employed, illustrates 'how we can achieve some of the advances needed to narrow the gap between existing capabilities and the theoretical limit.

Picture

Figure 14. Latest advance.

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Posted: May 08, 2007 08:19 AM
Last Updated: Aug 05, 2011 12:57 PM