LINEAR PHASOLVER MEASURING ENGINE

• Document Type: CREST
• Collection: NGA Records (Formerly NIMA)
• Document Number (FOIA) /ESDN (CREST): CIA-RDP78B04770A002900020051-4
• Release Decision: RIPPUB
• Original Classification: K
• Document Page Count: 3
• Document Creation Date: December 28, 2016
• Document Release Date: June 28, 2006
• Sequence Number: 51
• Publication Date: August 24, 1964
• Content Type: REPORT

Approved For Release 2006/06/28: CIA-RDP78B04770A002900020 51-4
August 24, 1964
LINEAR PHASOLVER MEASURING ENGINE
''h will be shut down for vacation
from August 24 until after Labor Day, 8 September.
The pattern master which was received fro August
been measured ;3]y
is out with the u an
was in the middle of reviewing the measurement
data.
STAT
STAT
OTAT
The patterns are not as good as they could be, but the question
Pete is trying to resolve is whether they are good enough
for submicron measuring. The first and second harmonic
errors, if constant from pole to pole, will wash out
electrically. Pete thinks that second harmonic errors are
a result of bleeding during pattern exposure and development.
Pete's tentative opinion is that the patterns are good enough
to achieve 1/4 micron measurement resolution and they probably
STAT
should b t on to Ito prepare the working pattern.
STAT
He and however, wi have to discuss this thoroughly
after care u review of the measurement data.
A copy of instructions tol is enclosed. OTAT
It illustrates the pattern at double scale. is simple
set of measurements generates so much data that it-is a
real chore to assimilate it and judge the pattern quality.
It is expected I Iwill take a month to prepare the working STAT
driver and then will require one to two months for STAT
setup and trial. it looks like the demonstration will not
take place before November.
Since thel has been doing a STAT
good job, oug Heir o er divisions might have applicable
talents and their general brochure is enclosed. The only
other o ibi i - see would be computer programs
from It is extremely difficult, STAT
however, to use that type of service.
DDR-NOTA
PUPE
Enclosures
 Approved For Release 2006/06/28: CIA-RDP78B04770A002900020051-4
L uvTioi i rUH THE i"1EASUh OF
LIIft Art i'HASOLVErt PATTERN CONSI fl
OF 1000-2405 and 1000-2408
? Pattern 1000-240
p. 1
1) Tabu1tte 21 consecutive measurements of sine wave heist
(Y axis) Vs. equal increments of .050 mm in X. The starting point
should be the Average of min. & rnax. values of Y.
T' is procedure is to be repeated a total of 3 times within this
pattern as noted A. B, and C on page 2. A and B denote two non-adjacent
sine waves near the center of the pattern. C is the same sine wave as A
I*
but near the and of the pattern.
2) Measure the a;iadrature (phase displacement) at one place on
the pattern as shown at D on nRge 2.
Pattern 1000--21.08
3) Tabulate 21 measurements as in 1) above 3 places, 13, F, and G
? on paa:e 2. E and F are two non-adjacent sine waves near the center
of the pattern. G is the same sine wave as E but near the end of the
pattern. Measure from datum line in plus Y direction only.
t}) Measure the quadrature (phase displacement) in six places,
three in each half of the pattern as shown in H, Is, J and K, L, M.
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Approved For Release 2006/06/28 :A-RDP78B04770A002900020051-4
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