PRELIMINARY TECHNICAL REPORT SUBMICRON MEASUREMENT ERROR ANALYSIS

Document Type: 
Document Number (FOIA) /ESDN (CREST): 
CIA-RDP79B00873A000800010007-9
Release Decision: 
RIPPUB
Original Classification: 
K
Document Page Count: 
65
Document Creation Date: 
December 28, 2016
Document Release Date: 
October 18, 2012
Sequence Number: 
7
Case Number: 
Publication Date: 
November 8, 1964
Content Type: 
REPORT
File: 
AttachmentSize
PDF icon CIA-RDP79B00873A000800010007-9.pdf3.45 MB
Body: