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ACM-'S !ON KA! A P40462-'45
j3/bG4s/a4./M/DO9 4431/14-S5
a nit
AUMOR: YaraiOv!4, -41 L
TITIY! SputtOrLtW of PLUI-q- ~21t4bl' of 111-IF type O:t ~rovp
CC~DdL.r,mcz Otj C ath-,40 Eler3trolliez I.,---J 6 Nov U3
AN 5E8R, jzve~stjv
a, Seri-ve- 28- no-9. 14. -14
a ro 0 nie. a
of singla ar:p"Le of lr~Sh cad Gahs wts -Invest1g:ated. Th-too
am t w-l:t )-~x vem caiosen gor mtLrdy pd..-tly bt~oau-2-s of their technical tiRgIttanze, mmj
partly to witterj rj-~ir knowledge of sputterlng aaisotropj to gwre complam crystal
tha:i tho s4lnyle cubic ei,,mzturea px-evouamly ;Livestigated. It vas 21,9o
dttli-o-wi to obto?tn iu1,.,vrmt1on clancigritivg tba rolativa ~?guttnrias mt4a of the dif -
1*mniz Q4=qon=-- 4a,4 4mpound. A gph;e~x;a ciat Xwmm a aWg.%G--*r-Ota;, 4d the -Atax-lalf
UrAw. irw6-1_,ptiCv-3 W'a's kka-11 at a n-0 etAvo p~Aential orl I to 3 MY, in a piaamm (Prer-
OR U I'v-10 3 gm 5fr,. 1w dewity - 1011 C'm -3; compwitloa - umpecSfIed), and the
vaZesLal wil collected an tha inver wall of L spAarical glaze mh611 Our-
taim arysta Lloq -aphlt axem , via-A detr-valm-bd chemioally, s"etroscopicall 1, OLDd by
iwano i~wf oitmtrm diffmoT.I(m. In add-Uion to Zho usual circular opota )f sputtered
rAterial, h~-,mgmal EipotB were
tomr-4d. These wv3ro centiared in the L-111 ..
directions,
and their cDxmc)-s -.;ere in the 110 aid 114 dirive-tiams. The hexagonal
' spots wel-e
more t5l"rly do,oloped for In.9b than lor GaAa. in the
11YJ directions 'he pattern
Wap d1iferent.: ;h-- lj spots were ve--v weak and the spots were Lbeent. It
*V-* +h cb hill .14-
The gmeral bac qrrcrund of sputtcred nate - la I P-m^ the spots' fo-rmc- di-
vac1;1,'Yr,a Tv,,ro ly mnld to gowlat -,mly of Vie Qo-af-v'nd In3b, Thip hexagonAl ap~ts Con-
Gist.-A A15C mw -~Iy o1 InSb, but they contaln~A adatxturea ol free In in t 2 fill],
(13.03 41.41 dlo,timu~ Frpo in w?,s also famd in the decosit in tha mol (an-
.#ppl.ftya.
105r). It J'P- ezolcluo'cd that not only tbia AIOQ~uvlng affect, but also 00111airma near
the *mrlhoc eirto i-tportant. Ho 0,atlafactarry explaxiation w" foixod for the differmce
F
A3
A I ON P404b2DM)
botwcar, the patf~CUPV !~! tk,-'3 t1nd -Mi (Il.recticim, nor for the prilomzt1al.
upitt-ST).ng of 'rWAllm In th"I L1101 dJ ri,.~t ion. "1q concluoicn, we exprodo our grati-
tkri, to 11,is jiltsirsp-t ii,. the work aM. fov valtzabla remarlj, tu
91 rEvi wvz k I --ra , Le, va . Dag hey a k,' 4t anti Yo - U Vf or mking tha d mW ri t ic; tftS b
ximi J*r valm%bla f~lld a1-90 tO.Y,V,&h9LkbuAnOv-fcr h-116
t-.e ol%ctrork d1g9vactiou brig.ft-t.Las: "I figurea.
ASSOCUMCM: Fizi(~~heukiy fakul~tst %Luiversiteta
RML,. 00
SU8 Ovmi'b; it- 3: R"I 0,03 GTUFl 1 006
Av,mr-wi pimh-" i"kly, V.A. V.YEj,
'M ------- ----- d,4-0~i`4 irw~piiv~
Qf th, ttof-s ffloport, Tath CocJzivt~vo --rL Ciai-bodto RI.eatmrijam I old in Kiev
IQ
fi7i~noskayn, v.28, no,9, 1964, 14118-1482
ig Z' -opp,4r s Lng I oo r)r3 rW
e i, in- e b ot w 1, ;1 i. i rco-si o2 t h-3 I ri Id ent i Gris ind the ~Iloj
Flr-i~ Va fputt-,~r--rg, vat~A nf polp~rvq tall Ule Coppor deter-
;h, e~r"r, qql-o 1)~ Fat .3-,' -1 ~,ii 1 ---o d rawr. fth e f ocus --N I col 1,1,i I-M
-G-L arl1w (R-U-ni Lor--- -x-, -1-! P~~" 129,12-10,19tll. Tt~- teca-all -C'mc-irif-C with
xx- T V4 a QU L S.
7~~rq ri ~,L ~lpalimen-, -aind with cyiInt em- cut ~vith
1~ _vmKe 4rjkp"xd
d *t'E poto-Afal of
-
to 11ho sljrfw~-, there 12 such loentims on the
A ynt~.q t. u I el t r) d e t l3 rn I n i- i; rx *~ r 9 ri ag ra t e oul y 9 o r re z 17 f r a ma I r. -
L.& ;iuo~ iLxis tc L--.e The specimens Nero bcaibard-
-atsvl ab-cut Its axiv, r,id i,e F;puttw**' ne ratan for dilferent orientz-
-A -.rxtnt7NJ lrose the dansJty of ~h4z aputttirfc mrterial depoi!~ted on -4 all-
a r tang ot It waz p